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薄膜作製応用ハンドブック
多賀康訓 [ほか] 編集委員. -- エヌ・ティー・エス, 1995. <TW00092996>
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薄膜作製応用ハンドブック
多賀康訓 [ほか] 編集委員. -- エヌ・ティー・エス, 1995. <TW00092996>
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Bibliography Details
title and statement of responsibility area
薄膜作製応用ハンドブック / 多賀康訓 [ほか] 編集委員
ハクマク サクセイ オウヨウ ハンドブック
publication,distribution,etc.,area
東京 : エヌ・ティー・エス , 1995.11
physical description area
23, 1187, 26p ; 27cm
Volume Information
ISBN
4900830062
note
監修: 権田俊一
note
執筆者: 権田俊一ほか
note
各章末: 参考・引用文献
note
ほかの編者: 塚田俊久, 平尾孝
NCID
BN13515927
text language code
Japanese
author link
権田, 俊一(1936-)||ゴンダ, シュンイチ <AU00306289>
author link
多賀, 康訓||タガ, ヤスノリ <AU00306290>
author link
塚田, 俊久||ツカダ, トシヒサ <AU00306291>
author link
平尾, 孝||ヒラオ, タカシ <AU00306292>
classification
Electronic engineering NDC8:549
classification
Electronic engineering NDC8:549.036
classification
Science and technology NDLC:ND2
classification
Science and technology NDLC:ND371
subject headings
薄膜||ハクマク
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author
権田, 俊一(1936-)
多賀, 康訓
塚田, 俊久
平尾, 孝
classification
Electronic engineering NDC8:549
Electronic engineering NDC8:549.036
Science and technology NDLC:ND2
Science and technology NDLC:ND371
subject
薄膜
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